AHMED, M. H. . Photolithography methods for 3D microstructures and 3D stacking devices. International Journal of New Practices in Management and Engineering, [S. l.], v. 11, n. 1S, p. 13–15, 2022. DOI: 10.17762/ijnpme.v11i1S.120. Disponível em: https://ijnpme.org/index.php/IJNPME/article/view/120. Acesso em: 2 oct. 2025.